Fluid control syringe pump XLP6000 that does not waste EUV resist.
The flow rate of the ejected liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!
Ideal for dispensing resist liquid droplets for spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the dispensing unit that does not depend on external pressure and flow controllers! Liquid volume range per dispensing: 1nl to 50ml Liquid volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Liquid volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge amount and speed using an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage with I/O terminals. Simple management of maintenance timing with operating amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and up to 12-port valves can be installed.
- Company：テカンジャパン
- Price：100,000 yen-500,000 yen
